Aluminum films deposition by magnetron sputtering systems: Influence of target state and pulsing unit
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چکیده
منابع مشابه
Nitrogen and Aluminum Doped Diamond-like Carbon Thin Films by Dc Magnetron Sputtering Deposition
Diamond-like carbon (DLC) thin films used in this study were prepared with DC magnetron sputtering deposition. Silicon (100) wafers were used as the substrates onto which an RF bias was applied during the film deposition. For the nitrogen doped DLC films, a pure graphite target was used as the carbon source and nitrogen gas was introduced into the deposition chamber via a mass flow controller. ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2016
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/741/1/012193